SURFACE FINISHING OF NANOSCRATCH PATTERNS ON COATED PYREX GLASSES USING MAF
- Title
- SURFACE FINISHING OF NANOSCRATCH PATTERNS ON COATED PYREX GLASSES USING MAF
- Author
- 이성환
- Keywords
- MAF; nanofinishing; IZO coated pyrex glass; DOE; acoustic emission monitoring; coating boundary detection
- Issue Date
- 2017-06
- Publisher
- World Scientific Publishing Co. Pte Ltd
- Citation
- SURFACE REVIEW AND LETTERS, v. 24, No. 4, Article no. 1750043
- Abstract
- We investigate a surface finishing scheme fitted for AFM scratched nanopatterns on a coated surface using magnetic abrasive finishing (MAF). First, nanoscale patterning was carried out on IZO-coated Pyrex glass, with a specially-designed AFM machining setup. After AFM machining, nonuniform surface features such as pile-ups are generated, and the final shapes are often more complicated for coated materials. For this reason, MAF was implemented for the nanoscale removal of pile-up/debris of coated materials and design of experiment (DOE) was utilized to obtain optimal process conditions for the finishing process. The process was monitored using acoustic emission (AE) for coating-substrate (glass) boundary detection, as well for monitoring the polishing status/depth. Experimental results indicate the viability of the proposed scheme as a nanoscale selective finishing technique for various material setups.
- URI
- https://repository.hanyang.ac.kr/handle/20.500.11754/128442https://www.worldscientific.com/doi/abs/10.1142/S0218625X17500433
- ISSN
- 0218-625X
- DOI
- 10.1142/S0218625X17500433
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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