Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이성환 | - |
dc.date.accessioned | 2020-02-20T07:06:58Z | - |
dc.date.available | 2020-02-20T07:06:58Z | - |
dc.date.issued | 2017-06 | - |
dc.identifier.citation | SURFACE REVIEW AND LETTERS, v. 24, No. 4, Article no. 1750043 | en_US |
dc.identifier.issn | 0218-625X | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/128442 | - |
dc.identifier.uri | https://www.worldscientific.com/doi/abs/10.1142/S0218625X17500433 | - |
dc.description.abstract | We investigate a surface finishing scheme fitted for AFM scratched nanopatterns on a coated surface using magnetic abrasive finishing (MAF). First, nanoscale patterning was carried out on IZO-coated Pyrex glass, with a specially-designed AFM machining setup. After AFM machining, nonuniform surface features such as pile-ups are generated, and the final shapes are often more complicated for coated materials. For this reason, MAF was implemented for the nanoscale removal of pile-up/debris of coated materials and design of experiment (DOE) was utilized to obtain optimal process conditions for the finishing process. The process was monitored using acoustic emission (AE) for coating-substrate (glass) boundary detection, as well for monitoring the polishing status/depth. Experimental results indicate the viability of the proposed scheme as a nanoscale selective finishing technique for various material setups. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | World Scientific Publishing Co. Pte Ltd | en_US |
dc.subject | MAF | en_US |
dc.subject | nanofinishing | en_US |
dc.subject | IZO coated pyrex glass | en_US |
dc.subject | DOE | en_US |
dc.subject | acoustic emission monitoring | en_US |
dc.subject | coating boundary detection | en_US |
dc.title | SURFACE FINISHING OF NANOSCRATCH PATTERNS ON COATED PYREX GLASSES USING MAF | en_US |
dc.type | Article | en_US |
dc.relation.no | 4 | - |
dc.relation.volume | 24 | - |
dc.identifier.doi | 10.1142/S0218625X17500433 | - |
dc.relation.page | 1-11 | - |
dc.relation.journal | SURFACE REVIEW AND LETTERS | - |
dc.contributor.googleauthor | LEE, SEOUNG HWAN | - |
dc.relation.code | 2017000813 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MECHANICAL ENGINEERING | - |
dc.identifier.pid | sunglee | - |
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