Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas
- Title
- Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas
- Author
- 정진욱
- Keywords
- DISCHARGE
- Issue Date
- 2017-01
- Publisher
- AMER INST PHYSICS
- Citation
- PHYSICS OF PLASMAS, v. 24, no. 1, Article no. 013508
- Abstract
- A floating type Langmuir probe was studied to measure the electron energy distribution function (EEDF) in plasmas. This method measures the current (I)-voltage (V) curve with rising and falling variations based on a floating potential by using charge-discharge characteristics of the series capacitor when a square-pulse voltage is applied. In addition, this method measures the EEDF by using the alternating current (ac) superposition method. The measured EEDFs were in good agreement with results from a conventional single Langmuir probe. This technique could be applied as a plasma diagnostic method in the capacitively coupled plasma where the plasma potential is extremely high or the processing plasma where the deposition gas is used. Published by AIP Publishing.
- URI
- https://aip.scitation.org/doi/10.1063/1.4972576https://repository.hanyang.ac.kr/handle/20.500.11754/112223
- ISSN
- 1070-664X; 1089-7674
- DOI
- 10.1063/1.4972576
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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