Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2019-11-18T08:03:42Z | - |
dc.date.available | 2019-11-18T08:03:42Z | - |
dc.date.issued | 2017-01 | - |
dc.identifier.citation | PHYSICS OF PLASMAS, v. 24, no. 1, Article no. 013508 | en_US |
dc.identifier.issn | 1070-664X | - |
dc.identifier.issn | 1089-7674 | - |
dc.identifier.uri | https://aip.scitation.org/doi/10.1063/1.4972576 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/112223 | - |
dc.description.abstract | A floating type Langmuir probe was studied to measure the electron energy distribution function (EEDF) in plasmas. This method measures the current (I)-voltage (V) curve with rising and falling variations based on a floating potential by using charge-discharge characteristics of the series capacitor when a square-pulse voltage is applied. In addition, this method measures the EEDF by using the alternating current (ac) superposition method. The measured EEDFs were in good agreement with results from a conventional single Langmuir probe. This technique could be applied as a plasma diagnostic method in the capacitively coupled plasma where the plasma potential is extremely high or the processing plasma where the deposition gas is used. Published by AIP Publishing. | en_US |
dc.description.sponsorship | This work was supported by the National R&D program (NRF-2014M1A7A1A03045185) of the National Research Foundation of Korea, the MOTIE/KSRC support program (10052861) for the development of the future semiconductor device, and the Korea Research Institute of Standard and Science (KRISS) and the R&D Convergence Program (CAP-16-04-KRISS). | en_US |
dc.language.iso | en | en_US |
dc.publisher | AMER INST PHYSICS | en_US |
dc.subject | DISCHARGE | en_US |
dc.title | Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas | en_US |
dc.type | Article | en_US |
dc.relation.no | 1 | - |
dc.relation.volume | 24 | - |
dc.identifier.doi | 10.1063/1.4972576 | - |
dc.relation.page | 1-5 | - |
dc.relation.journal | PHYSICS OF PLASMAS | - |
dc.contributor.googleauthor | Choi, Ikjin | - |
dc.contributor.googleauthor | Kim, Aram | - |
dc.contributor.googleauthor | Lee, Hyo-Chang | - |
dc.contributor.googleauthor | Kim, Dong-Hwan | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.relation.code | 2017001875 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
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