Low-temperature-grown transition metal oxide based storage materials and oxide transistors for high-density non-volatile memory
- Title
- Low-temperature-grown transition metal oxide based storage materials and oxide transistors for high-density non-volatile memory
- Author
- 강보수
- Keywords
- HIGH-SPEED; NIO FILMS; SWITCH
- Issue Date
- 2009-05
- Publisher
- WILEY-V C H VERLAG GMBH
- Citation
- ADVANCED FUNCTIONAL MATERIALS, v. 19, No. 10, Page. 1587-1593
- Abstract
- An effective stacked memory concept utilizing all-oxide-based device components for future high-density nonvolatile stacked structure data storage is developed. GaInZnO (GIZO) thin-film transistors, grown at room temperature, are integrated with one-diode (CuO/InZnO)-one-resistor (NiO) (1D-1R) structure oxide storage node elements, fabricated at room temperature. The low growth temperatures and fabrication methods introduced in this paper allow the demonstration of a stackable memory array as well as integrated device characteristics. Benefits provided by low-temperature processes are demonstrated by fabrication of working devices over glass substrates. Here, the device characteristics of each individual component as well as the characteristics of a combined select transistor with a 1D-1R cell are reported. X-ray photoelectron spectroscopy analysis of a NiO resistance layer deposited by sputter and atomic layer deposition confirms the importance of metallic Ni content in NiO for bi-stable resistance switching. The GIZO transistor shows a field-effect mobility of 30 cm(2) V-1 s(-1), a V-th of +1.2V, and a drain current on/off ratio of up to 10(8), while the CuO/InZnO heterojunction oxide diode has forward current densities of 2 x 10(4) A cm(-2). Both of these materials show the performance of state-of-the-art oxide devices.
- URI
- https://onlinelibrary.wiley.com/doi/abs/10.1002/adfm.200801032https://repository.hanyang.ac.kr/handle/20.500.11754/103940
- ISSN
- 1616-301X
- DOI
- 10.1002/adfm.200801032
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > APPLIED PHYSICS(응용물리학과) > Articles
- Files in This Item:
There are no files associated with this item.
- Export
- RIS (EndNote)
- XLS (Excel)
- XML