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GRADUATE SCHOOL[S](대학원)
BIONANOTECHNOLOGY(바이오나노학과)
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Results 21-30 of 84 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2013-05
Hybrid Cleaning Technology for Enhanced Post-Cu/Low-Dielectric Constant Chemical Mechanical Planarization Cleaning Performance
박진구
2013-05
Investigation of Source-Based Scratch Formation During Oxide Chemical Mechanical Planarization
박진구
2013-08
Shockwave-induced deformation of organic particles during laser shockwave cleaning
박진구
2013-02
Development of CO2 gas cluster cleaning method and its characterization
박진구
2013-02
Characterization of TMAH based cleaning solution for post Cu-CMP application
박진구
2016-10
Effect of Feature Spacing When Injection Molding Parts With Microstructured Surfaces
박진구
2016-09
Influence of non-uniform intensity distribution of deformed pellicle for N7 patterning
박진구
2012-07
Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing
박진구
2016-05
Investigation of cu-BTA complex formation during Cu chemical mechanical planarization process
박진구
2011-06
Enhanced Fluorescence by Controlled Surface Roughness of Plastic Biochip
박진구
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CMP
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SURFACE
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Pellicle
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REDUCTION
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BENZOTRIAZOLE
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Ceria
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CHEMICAL-MECHANICAL PLANARIZATION
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Corrosion
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FILMS
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Fixed abrasive pad
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