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Shockwave-induced deformation of organic particles during laser shockwave cleaning

Title
Shockwave-induced deformation of organic particles during laser shockwave cleaning
Author
박진구
Keywords
NANOPARTICLE REMOVAL; INDUCED PLASMA; ADHESION; HUMIDITY; WAVES
Issue Date
2013-08
Publisher
AMERICAN INSTITUTE OF PHYSICS
Citation
Journal of Applied Physics, Aug 2013, 114(6), P.063104
Abstract
Although the laser shockwave cleaning process offers a promising alternative to conventional dry-cleaning processes for nanoscale particle removal, its difficulty in removing organic particles has been an unexplained problem. This work elucidates the physics underlying the ineffectiveness of removing organic particles using laser shock cleaning utilizing polystyrene latex particles on silicon substrates. It is found that the shockwave pressure is high enough to deform the particles, increasing the contact radius and consequently the particle adhesion force. The particle deformation has been verified by high-angle scanning electron microscopy. The Maugis-Pollock theory has been applied to predict the contact radius, showing good agreement with the experiment. (C) 2013 AIP Publishing LLC.
URI
http://aip.scitation.org/doi/10.1063/1.4818307http://hdl.handle.net/20.500.11754/45491
ISSN
0021-8979
DOI
10.1063/1.4818307
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > BIONANOTECHNOLOGY(바이오나노학과) > Articles
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