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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-10 of 20 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2004-02
A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
박진구
2005-06
Fabrication of metal line on plastic substrate by hot embossing and CMP process
박진구
2004-11
Slurry에 첨가되는 pH 적정제가 Cu CMP에 미치는 영향 분석
박진구
2001-08
Physical and chemical characterization of reused oxide Chemical Mechanical Planarization slurry
박진구
2004-07
CMP 공정중 전기화학적 방법과 마찰력을 이용하여 Cu Wafer와 Disc의 특성 비교
박진구
2001-03
Physical and Chemical Characterization of Reused Oxide Chemical Mechanical Planarization Slurry
박진구
2002-11
Point of Use Regeneration of Oxide Chemical Mechanical Planarization Slurry by Filterations
박진구
2021-09
Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum
박진구
2002-11
Point of use regeneration of oxide chemical mechanical planarization slurry by filtrations
박진구
2000-03
Effect of chemicals and slurry particles on chemical mechanical polishing of polyimide
박진구
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4
oxide slurry
4
TEOS removal rate
3
Pad debris
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Scratch
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conductivity
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defect density
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hydrogen peroxide
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microscratch
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pH of slurry
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regenerated slurry
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2020 - 2023
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2010 - 2019
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2000 - 2009
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