2016-07 | GeOx interfacial layer scavenging remotely induced by metal electrode in metal/HfO2/GeOx/Ge capacitors | 안진호 |
2015-09 | HF 습식 식각을 이용한 극자외선 노광 기술용 SiNx 펠리클 제작 공정 | 안진호 |
2020-08 | High growth rate and high wet etch resistance silicon nitride grown by low temperature plasma enhanced atomic layer deposition with a novel silylamine precursor | 안진호 |
2022-03 | High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane | 안진호 |
2022-01 | Highly Reliable Selection Behavior with Controlled Ag Doping of Nano-polycrystalline ZnO Layer for 3D X-Point Framework | 안진호 |
2014-04 | Highly sensitive wide bandwidth photodetectors using chemical vapor deposited graphene | 안진호 |
2016-07 | Impact of EUV Pellicle Transmittance on Imaging Performance Analyzed by Coherent Scattering Microscopy | 안진호 |
2012-01 | Impact of ozone concentration on atomic layer deposited HfO2 on GaAs | 안진호 |
2015-03 | Impact of the non-uniform intensity distribution caused by a meshed pellicle of extreme ultraviolet lithography | 안진호 |
2022-01 | Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicle | 안진호 |
2011-03 | Improved electrical properties of Pt/HfO2/Ge using in situ water vapor treatment and atomic layer deposition | 안진호 |
2016-07 | Improved Margin of Absorber Pattern Sidewall Angle Using Phase Shifting Extreme Ultraviolet Mask | 안진호 |
2018-03 | Improved resistive switching characteristics of a Pt/HfO2/Pt resistor by controlling anode interface with forming and switching polarity | 안진호 |
2016-04 | Influence of Annealing Temperature on Structural and Optical Properties of Undoped and Al-Doped Nano-ZnO Films Prepared by Sol–Gel Method | 안진호 |
2019-04 | Interface-Driven Phase Transition of Phase-Change Material | 안진호 |
2022-04 | Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography | 안진호 |
2015-07 | Lattice Distortion in In3SbTe2 Phase Change Material with Substitutional Bi | 안진호 |
2015-08 | Lattice Distortion in In3SbTe2 Phase Change Material with Substitutional Bi (vol 5, 12867, 2015) | 안진호 |
2020-07 | Low Temperature Thermal Atomic Layer Deposition of Aluminum Nitride Using Hydrazine as the Nitrogen Source | 안진호 |
2018-01 | Mask Materials and Designs for Extreme Ultra Violet Lithography | 안진호 |