Self-refreshing characteristics of an airborne particle sensor using a bridged paddle oscillator
- Title
- Self-refreshing characteristics of an airborne particle sensor using a bridged paddle oscillator
- Author
- 이승백
- Keywords
- MEMS; Airborne particle sensor; Self-refreshing; Mass detection
- Issue Date
- 2016-05
- Publisher
- KOREAN PHYSICAL SOC
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v. 68, NO 10, Page. 1170-1175
- Abstract
- We report on the self-refreshing characteristics of a micromachined airborne particle sensor. The sensor consists of a bridge-type beam having an oscillating paddle-type particle collector at its center. When a positive potential is applied to the paddle, the sensor is able to attract and collect negatively charged airborne particles while oscillating close to its resonant frequency and thereby measure their density from the change in the oscillating phase at similar to 10 pg resolution. When the applied potential is removed, the collected particles are detached from the sensor due to momentum transfer from the oscillating paddle, thus demonstrating a self-refreshing capability.
- URI
- https://link.springer.com/article/10.3938%2Fjkps.68.1170https://repository.hanyang.ac.kr/handle/20.500.11754/71033
- ISSN
- 0374-4884; 1976-8524
- DOI
- 10.3938/jkps.68.1170
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
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