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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
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Results 11-15 of 15 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2001-02
약한 외부 자장에 의한 유도 결합형 플라즈마에서의 Helicon Wave
김곤호
2001-02
안테나 형태에 따른 대면적 ICP 플라즈마의 균일도 변화에 관한 연구
김곤호
2001-01
The measurement of nitrogen ion species ratio in the inductively coupled plasma source ion implantation
김곤호
2001-01
Measurement of sheath expansion in plasma source ion implantation
김곤호
2001-10
정전 용량변화에 따른 대기압 DBD 반응기의 동작특성 연구
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Plasma source ion implantation
1
0.15µm MOSFET
1
background doping concentration
1
Ion ratio
1
Ion species
1
Ion wave
1
junction depth
1
Langmuir prob
1
Langmuir probe
1
Low-pressure oxygen RF discharge
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