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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-10 of 15 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2006-02
Reflow modeling for elongated contact hole shape
오혜근
2006-02
Reflow modeling for elongated contact hole shape
홍주유
2004-05
Simple 157-nm interference illumination system for pattern formation
오혜근
2004-05
Exposure simulation of electron beam microcolumn lithography
오혜근
2004-04
Simulation benchmarking for the whole resist process
오혜근
2005-05
The evaluation of aberration effects according to pattern shape and duty ratio
오혜근
2005-05
Simulation of thermal resist flow process
오혜근
2008-11
Influence of Various Defects on Extreme Ultra-Violet Mask
오혜근
2008-11
Solving the Navier-Stokes Equation for Thermal Reflow
오혜근
2004-11
Bulk effects of the thermal flow resists
오혜근
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-Author
12
오혜근
2
정영대
1
홍주유
-Subject
6
Lithography simulation
3
Chemically amplified resist
2
Chemically-amplified resist
2
Contact hole
2
Navier-stokes equation
2
Resist reflow
2
Simulation
2
Viscosity
1
22 nm node
1
Absorption
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2009
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2004
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