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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 11-20 of 27 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2004-11
A study of process parameter control for nanopattern
오혜근
2015-04
Patterning dependence on the mask defect for extreme ultraviolet lithography
오혜근
2007-02
Characteristics and prevention of pattern collapse in EUV lithography
오혜근
2002-12
Process Study of a 200 nm Laser Pattern Generator
오혜근
2009-08
Impact of the Parameters for a Chemically-amplified Resist on the Line-edge-roughness by Using a Molecular-scale Lithography Simulation
정영대
2010-03
Mechanism of Embedded Micro/Nano Channel Formation for a Negative-tone Photoresist by Moving Mask Lithography
정영대
2011-01
Advanced Lithography Simulation for Various 3-Dimensional Nano/Microstructuring Fabrications in Positive- and Negative-Tone Photoresists
정영대
2010-12
Simulation Study of Sub-10 nm Pattern Formation Using Diblock Polymer Directed Self-assembly
정영대
2010-05
A study of virtual lithography process for polymer directed self-assembly
정영대
2009-04
Impact of Polarization Inside a Resist for ArF Immersion Lithography
정영대
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-Author
20
오혜근
6
정영대
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홍주유
-Subject
9
Lithography simulation
5
Chemically amplified resist
4
Simulation
2
Analytical models
2
Automotive materials
2
CCSE
2
Chemical analysis
2
Chemical lasers
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Chemically-amplified resist
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Components, Circuits, Devices and...
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-Date issued
5
2010 - 2015
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2000 - 2009
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1999 - 1999
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