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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 11-15 of 15 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2004-11
A study of process parameter control for nanopattern
오혜근
2007-02
Characteristics and prevention of pattern collapse in EUV lithography
오혜근
2009-08
Impact of the Parameters for a Chemically-amplified Resist on the Line-edge-roughness by Using a Molecular-scale Lithography Simulation
정영대
2009-04
Impact of Polarization Inside a Resist for ArF Immersion Lithography
정영대
2004-06
The Extraction of Develop Parameters by Using Cross-Sectional Critical Shape Error Method
오혜근
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오혜근
2
정영대
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홍주유
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Lithography simulation
3
Chemically amplified resist
2
Chemically-amplified resist
2
Contact hole
2
Navier-stokes equation
2
Resist reflow
2
Simulation
2
Viscosity
1
22 nm node
1
Absorption
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2004
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