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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-4 of 4 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2018-10
A possible wafer heating during EUV exposure
오혜근
2018-10
Pattern Degradation with Larger Particles on EUV Pellicle
오혜근
2018-05
modeling of thermomechanical changes of euv mask and their dependence on absorber variation
오혜근
2018-06
Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents
오혜근
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CD degradation
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CD uniformity
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Cleaning
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EUV
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EUV LITHOGRAPHY
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EUV lithography
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EUV mask
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EUV pellicle
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EXPOSURE
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Hydrocarbon contaminant
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