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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 91-100 of 141 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2004-08
Photoinduced patterning of gold thin film
오혜근
2002-12
Process Study of a 200 nm Laser Pattern Generator
오혜근
2002-12
Resist distribution effect of spin coating
오혜근
2002-06
Sensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical Dimension
오혜근
2002-06
Development of multichannel ellipsometry with synchronously rotating polarizer and analyzer
오혜근
2001-12
Parameter extraction for 193 nm chemically amplified resist from refractive index change
오혜근
2000-12
Line Width Variation due to Global Topography
오혜근
2001-03
Post Exposure Delay Consideration in 193 nm Chemically Amplified Resist
오혜근
2002-03
Resist Distribution Effect of Spin Coating
오혜근
2002-03
Resist Develop Prediction by Monte Carlo Simulation
오혜근
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Lithography
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lithography
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ellipsometry
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Simulation
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Chemically amplified resist
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Lithography simulation
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Resist reflow process
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Aerial image
5
EUV lithography
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EUV mask
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