Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
Articles
Theses (Master)
Theses (Ph.D.)
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-5 of 5 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2004-05
Aerial image characterization for the defects in the extreme ultraviolet mask
오혜근
2005-03
Line width variation with absorber thickness in extreme ultraviolet lithography
오혜근
2008-02
The study of attenuated PSM structure for extreme ultra violet lithography with minimized mask shadowing effect(
오혜근
2002-10
Bulk Image Formation of Scalar Modeling in a Photoresist
오혜근
2003-02
Prediction of the Critical Dimensions by Using a Threshold Energy Resist Model
오혜근
previous
1
next
Discover
-Author
5
오혜근
-Subject
1
Horizontal-vertical CD bias
1
Lithography
1
Mask absorber
1
Mask thickness
1
Multilayer defect
1
Near field
1
OPC
1
Projection lens system
1
Resist model
1
Scalar model
< previous
next >
-Date issued
1
2008
1
2005
1
2004
1
2003
1
2002
BROWSE
Communities & Collections
Titles
Authors