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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-10 of 10 (Search time: 0.004 seconds).
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Issue Date
Title
Author(s)
2007-12
전자빔 리소그래피에서의 레지스트 내부 에너지 분포에 대한 전산모사 프로그램의 제작
정희준
2005-03
Contact hole reflow by finite element method
오혜근
2005-05
Simulation of thermal resist flow process
오혜근
2008-11
Solving the Navier-Stokes Equation for Thermal Reflow
오혜근
2008-12
Influence of mask feature on the diffracted light in proximity and contact lithography
오혜근
2004-11
Bulk effects of the thermal flow resists
오혜근
2004-11
A study of process parameter control for nanopattern
오혜근
2009-08
Impact of the Parameters for a Chemically-amplified Resist on the Line-edge-roughness by Using a Molecular-scale Lithography Simulation
정영대
2009-08
Modeling of the Cross-linking and the Diffusion Processes in a Negative Chemically Amplified Resist
정영대
2009-04
Impact of Polarization Inside a Resist for ArF Immersion Lithography
정영대
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Lithography
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Chemically amplified resist
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Chemically-amplified resist
2
Finite element method
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Microlithography
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Thermal reflow process
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CAR
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Electron Beam Lithography
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Finite-difference time domain
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Immersion lithography
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