Browsing "MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)" byAuthor박진구

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Showing results 56 to 85 of 264

Issue DateTitleAuthor(s)
2008-05Effect of a guard-ring on the leakage current in a Si-PIN X-ray detector for a single photon counting sensor박진구
2010-12Effect of acoustic cavitation on dissolved gases and their characterization during megasonic cleaning박진구
2004-11The Effect of Additives in Post Cu CMP Cleaning on Particle Adhesion and Removal박진구
2012-07Effect of Alkaline pH on Polishing and Etching of Single and Polycrystalline Silicon박진구
2023-03-22Effect of ammonium halide salts on wet chemical nanoscale etching and polishing of InGaAs surfaces for advanced CMOS devices박진구
2000-01Effect of Chemicals and Slurry Particles on Chemical Mechamical Polishing of Polyimide박진구
2000-03Effect of chemicals and slurry particles on chemical mechanical polishing of polyimide박진구
2005-11Effect of Corrosion inhibitor, Benzotriazole(BTA), on Particle Adhesion in Cu CMP박진구
2008-01Effect of Corrosion Inhibitor, Benzotriazole, in Cu Slurry on Cu Polishing박진구
2006-12Effect of diamonds on pad recovery in oxide and metal pad conditioning process박진구
2010-04Effect of Different Deposition Mediums on the Adhesion and Removal of Particles박진구
2014-07Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning박진구
2021-02Effect of Dissolved Oxygen on Removal of Benzotriazole from Co during a Post-Co CMP Cleaning박진구
2014-12Effect of FOUP atmosphere control on process wafer integrity in sub20 nm device fabrication박진구
2013-12Effect of La doping of ceria abrasives for STI CMP박진구
2015-05Effect of lanthanum doping in ceria abrasives on chemical mechanical polishing selectivity for shallow trench isolation박진구
2008-12Effect of laser shock wave cleaning direction on particle removal behavior at trenchs박진구
2002-10The Effect of Mechanical Properties of Polishing Pads on Oxide CMP박진구
2009-02Effect of O-2 Pretreatment on Fluorinated Carbon Film Surfaces박진구
2002-03Effect of Organic Acids in Copper Chemical Mechanical Planarization Slurry on Slurry Stability and Particle Contamination on Copper Surfaces박진구
2018-10Effect of organic acids in dilute HF solutions on removal of metal contaminants on silicon wafer박진구
2008-12Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions박진구
2014-12Effect of particle contamination on extreme ultraviolet (EUV) mask and megasonic cleaning process for its removal박진구
2007-10Effect of particle deposition and wet/dry cleaning methods on particle removal efficiency박진구
2016-06Effect of pH and chemical mechanical planarization process conditions on the copper-benzotriazole complex formation박진구
2009-01Effect of pH in Ru Slurry with Sodium Periodate on Ru CMP박진구
2006-12Effect of polish by-products on copper chemical mechanical polishing behavior박진구
2006-12Effect of poly silicon wettability on polymeric residue contamination박진구
2009-10Effect of Polysilicon Wettability on Polishing and Organic Defects during CMP박진구
2010-02Effect of Processing Parameters, Antistiction Coatings, and Polymer Type when Injection Molding Microfeatures박진구

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