Effect of Organic Acids in Copper Chemical Mechanical Planarization Slurry on Slurry Stability and Particle Contamination on Copper Surfaces
- Title
- Effect of Organic Acids in Copper Chemical Mechanical Planarization Slurry on Slurry Stability and Particle Contamination on Copper Surfaces
- Author
- 박진구
- Keywords
- Cu CMP slurry; Post Cu CMP cleaning; Organic acids; Citric acid; Oxalic acid; Succinic acid; Slurry stability
- Issue Date
- 2002-03
- Publisher
- INST PURE APPLIED PHYSICS
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v. 41, no. 3A, page. 1305-1310
- Abstract
- The purpose of this study was to investigate the effect of organic acids in alumina-based slurry on the stability of slurry particles and particle contamination on a wafer surface after Cu Chemical Mechanical Planarization (CMP). The electrokinetic behavior of alumina particles in the presence and absence of organic acids was studied. When organic acids were added to slurries, the charge reversal of zeta potential was measured on alumina particles in acidic pH ranges. The stability of alumina particles was seen to be dependent on the type of organic acid added to the slurry. An unstable suspension of particles was observed when oxalic and succinic acids were added to the slurry. The presence of citric acid led to a stable suspension of alumina particles in the slurry. The sedimentation rate of particles was calculated to be the slowest in the citric-acid-added slurry. No increase of particle size was measured in the slurry containing citric acid. A rapid increase of mean particle size was found when oxalic and succinic acids were added to the slurry. The addition of citric acid in the slurry effectively prevented a slurry particle contamination from the Cu surface after Cu CMP.
- URI
- https://iopscience.iop.org/article/10.1143/JJAP.41.1305/metahttps://repository.hanyang.ac.kr/handle/20.500.11754/156789
- ISSN
- 0021-4922; 1347-4065
- DOI
- 10.1143/JJAP.41.1305
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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