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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-4 of 4 (Search time: 0.001 seconds).
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Title
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2017-05
Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma
정진욱
2015-08
Correlation between vibrational temperature of N-2 and plasma parameters in inductively coupled Ar/N-2 plasmas
정진욱
2015-12
A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma
정진욱
2020-08
Electrical and plasma characterization of a hybrid plasma source combined with inductively coupled and capacitively coupled plasmas for O atom generation
정진욱
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13.56 MHZ
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ACTINOMETRY
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