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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-10 of 14 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2020-11
The opposite pressure dependence of electron temperature with respect to O-2/Ar mixing ratio in an inductively coupled plasma
정진욱
2020-10
Experimental observation of the effect of electron attachment and detachment reactions on the electron energy distribution in an inductive oxygen discharge
정진욱
2020-06
Effect of electron kinetics on plasma density in inductively coupled plasmas using a passive resonant antenna
정진욱
2020-06
A method for measuring negative ion density distribution using harmonic currents in a low-pressure oxygen plasma
정진욱
2020-03
Nonlinear circuit analysis of intermodulation currents in a floating Langmuir probe with a capacitive load
정진욱
2020-03
Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas
정진욱
2020-09
Effect of the RF bias on the plasma density in an argon inductively coupled plasma
정진욱
2020-08
Electrical and plasma characterization of a hybrid plasma source combined with inductively coupled and capacitively coupled plasmas for O atom generation
정진욱
2020-07
A method for measuring plasma parameters and dielectric film thickness by analyzing transient voltages for deposition plasma processing monitoring
정진욱
2020-07
Control of electron and ion density profiles via virtual ground position control in an inductively coupled plasma
정진욱
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-Subject
2
PLANAR COIL
2
TRANSITION
1
ACTINOMETRY
1
anodic aluminum oxide
1
ANTENNA
1
AR
1
ARGON
1
Capacitive coupling
1
cerium(IV)
1
CONTAMINATION
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