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Nonlinear circuit analysis of intermodulation currents in a floating Langmuir probe with a capacitive load

Title
Nonlinear circuit analysis of intermodulation currents in a floating Langmuir probe with a capacitive load
Author
정진욱
Issue Date
2020-03
Publisher
AMER INST PHYSICS
Citation
PHYSICS OF PLASMAS, v. 27, no. 3, article no. 033508
Abstract
When dual frequency omega(alpha), omega(beta) voltages with small amplitudes are biased toward a floating Langmuir probe, intermodulation currents of i(omega beta +/-omega alpha), i(omega beta +/-omega alpha) are generated due to the nonlinearity of the sheath near the probe tip. Electron temperatures and plasma densities can be obtained from the intermodulation currents using the sideband method. If the probe has a capacitive load such as a contaminated probe tip, harmonic and intermodulation voltages of the probe bias can be applied to the sheath. The sideband method can be modified using a harmonic balance technique that analyzes the nonlinear circuit. The intermodulation currents from the modified sideband were compared with the measured intermodulation currents. The electron temperatures and plasma densities obtained from the intermodulation currents are in close agreement with those of the electron energy probability functions in argon inductively coupled plasmas.
URI
https://aip.scitation.org/doi/10.1063/1.5133458https://repository.hanyang.ac.kr/handle/20.500.11754/162315
ISSN
1070-664X; 1089-7674
DOI
10.1063/1.5133458
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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