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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-10 of 15 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2016-11
Effects of antenna coil turns on plasma density and antenna voltage in solenoidal inductively coupled plasmas
정진욱
2016-11
Effects of antenna coil turns on plasma density and antenna voltage in solenoidal inductively coupled plasmas
Lin, Ming-Chieh
2016-12
Global model including multistep ionizations in helium plasmas
정진욱
2017-01
Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas
정진욱
2017-01
A study on plasma parameters in Ar/SF6 inductively coupled plasma
정진욱
2011-07
Electron energy flux control using dual power in side-type inductively coupled plasma
정진욱
2013-08
Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma
정진욱
2014-02
A relativistic self-consistent model for studying enhancement of space charge limited field emission due to counter-streaming ions
Ming-Chieh Lin
2014-02
Investigation of the Boltzmann relation in plasmas with non-Maxwellian electron distribution
정진욱
2015-04
On uniform plasma generation for the large area plasma processing in intermediate pressures
정진욱
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정진욱
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김주호
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Lin, Ming-Chieh
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Ming-Chieh Lin
-Subject
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ELECTRON-ENERGY DISTRIBUTION
3
HYSTERESIS
3
PLANAR COIL
3
POWER
3
TRANSITION
2
ENERGY DISTRIBUTION FUNCTION
2
INDUCTIVELY-COUPLED PLASMA
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RF
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ARRAYS
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ASPECT-RATIO
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