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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 1-4 of 4 (Search time: 0.002 seconds).
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2017-01
Nickel and nickel oxide thin films as absorber layer materials of extreme ultraviolet masks
안진호
2016-07
Impact of EUV Pellicle Transmittance on Imaging Performance Analyzed by Coherent Scattering Microscopy
안진호
2015-04
Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography
안진호
2015-11
Effect of extreme ultraviolet photoresist underlayer optical properties on imaging performance
안진호
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