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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 1-3 of 3 (Search time: 0.001 seconds).
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2017-04
ZrO2 film prepared by atomic layer deposition using less viscous cocktail CpZr[N(CH3)2]3 /C7H8 precursor and ozone
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2017-06
Structural, chemical, and electrical properties of Y2O3 thin films grown by atomic layer deposition with an (iPrCp)2Y(iPr-amd) precursor
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2017-02
Oxidant effect of La(NO3)3∙6H2O solution on the crystalline characteristics of nanocrystalline ZrO2 films grown by atomic layer deposition
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ZrO2
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(iPrCp)(2)Y(iPr-amd)
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Agglomeration
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Cocktail precursor
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CpZr(NMe2)(3)
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Crystalline structure
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Cycloheptatriene
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Grain size
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La(NO3)(3)center dot 6H(2)O solution
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Leakage current
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