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Showing results 58 to 87 of 103

Issue DateTitleAuthor(s)
2018-01Mask Materials and Designs for Extreme Ultra Violet Lithography안진호
2019-09Material design for Ge2Sb2Te5 phase-change material with thermal stability and lattice distortion안진호
2015-04Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography안진호
2020-03Memory Operations of Zero Impact Ionization, Zero Subthreshold Swing FET Matrix Without Selectors안진호
2014-12Metal-HfO2-Ge capacitor: Its enhanced charge trapping properties with S-treated substrate and atomic-layer-deposited HfO2 layer안진호
2021-12Microstructures of Hfox films prepared via atomic layer deposition using Ua(NO3)3·6H2O oxidants안진호
2021-11Nano-polycrystalline Ag-doped ZnO layer for steep-slope threshold switching selectors안진호
2013-07Nanolithography on Graphene by Using Scanning Tunneling Microscopy in a Methanol Environment안진호
2014-11Nanopatterned yttrium aluminum garnet phosphor incorporated film for high-brightness GaN-based white light emitting diodes안진호
2014-03Nanopatterned yttrium aluminumgarnet phosphor incorporated filmfor high-brightness GaN-based white light emitting diodes high-brightness GaN-based white light emitting diodes안진호
2011-06Nanosize Patterning with Nanoimprint Lithography Using Poly(vinyl alcohol) Transfer Layer안진호
2021-07A new route of synthesizing atomically thin 2D materials embedded in bulk oxides안진호
2017-01Nickel and nickel oxide thin films as absorber layer materials of extreme ultraviolet masks안진호
2020-03Ozone based high-temperature atomic layer deposition of SiO2 thin films안진호
2019-10Performance of Extreme Ultraviolet Coherent Scattering Microscope안진호
2016-09Phase Shift Mask to Compensate for Mask 3D Effect in High-Numerical-Aperture Extreme Ultraviolet Lithography안진호
2019-12Plasma Etching of SiO2 with CF3I Gas in Plasma-Enhanced Chemical Vapor Deposition Chamber for In-Situ Cleaning안진호
2021-03Plasma-Enhanced Atomic-Layer Deposition of Nanometer-Thick SiNx Films Using Trichlorodisilane for Etch-Resistant Coatings안진호
2013-04Raman spectroscopic image analysis on micropatterned graphene안진호
2018-06Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents안진호
2012-11Removing graphite flakes for preparing mechanically exfoliated graphene sample안진호
2015-09Resistive Switching Characteristics of Atomic-Layer-Deposited Y2O3 Insulators with Deposition Temperature안진호
2015-07Roughening of Polyimide Surface for Inkjet Printing by Plasma Etching Using the Polyimide Masked with Polystyrene Nanosphere Array안진호
2015-09SRAF를 적용한 극자외선 노광기술용 위상 변위 마스크의 반사도에 따른 이미징 특성 연구안진호
2013-08Stochastic Patterning Simulation Using Attenuated Phase-Shift Mask for Extreme Ultraviolet Lithography안진호
2011-12Structure, Raman, and photoluminescence properties of SnO2/MgO core-shell nanowires안진호
2016-09Sub-Resolution Assist Feature in Attenuated Phase-Shift Mask for Extreme Ultraviolet Lithography안진호
2014-08Substrate effects on the transmittance of 1D metal grid transparent electrodes안진호
2012-02Suppressed Thermally Induced Flatband Voltage Instabilities with Binary Noble Metal Gated Metal-Oxide-Semiconductor Capacitors안진호
2019-09Synthesis of Ag-ZnO core-shell nanoparticles with enhanced photocatalytic activity through atomic layer deposition안진호

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