Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2018-02-14T08:36:30Z | - |
dc.date.available | 2018-02-14T08:36:30Z | - |
dc.date.issued | 2012-04 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, 100 ,16, 164107 | en_US |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://aip.scitation.org/doi/abs/10.1063/1.3703608 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/37597 | - |
dc.description.abstract | Spatial distributions of the electron energy probability function were measured using a Langmuir probe in side-type argon-helium inductively coupled plasma. Collisional dominated electron heating and a concave shape of plasma density profile were observed at 10 mTorr pure argon. As the helium proportion increased, the electron heating and density profile changed to collisionless dominated heating and a convex shape respectively, and the same tendency was shown when the pressure decreased in the pure argon plasma. These changes were due to the decrease in the e-n collision frequency and the expansion of the electron power dissipation region. (C) 2012 American Institute of Physics. [http://dx.doi.org.access.hanyang.ac.kr/10.1063/1.3703608]http://dx.doi.org.access.hanyang.ac.kr/10.1063/1.3703608 | en_US |
dc.language.iso | en | en_US |
dc.publisher | AMER INST PHYSICS, CIRCULATION & FULFILLMENT DIV, 2 HUNTINGTON QUADRANGLE, STE 1 N O 1, MELVILLE, NY 11747-4501 USA | en_US |
dc.subject | argon | en_US |
dc.subject | helium | en_US |
dc.subject | Langmuir probes | en_US |
dc.subject | plasma collision processes | en_US |
dc.subject | plasma density | en_US |
dc.subject | plasma heating | en_US |
dc.subject | plasma pressure | en_US |
dc.subject | plasma transport processes | en_US |
dc.subject | probability | en_US |
dc.title | Effect of helium on spatial plasma parameters in low pressure argon-helium plasma | en_US |
dc.type | Article | en_US |
dc.relation.no | 16 | - |
dc.relation.volume | 100 | - |
dc.identifier.doi | 10.1063/1.3703608 | - |
dc.relation.page | 1-1 | - |
dc.relation.journal | APPLIED PHYSICS LETTERS | - |
dc.contributor.googleauthor | Bang, Jin-Young | - |
dc.contributor.googleauthor | Han, Duksun | - |
dc.contributor.googleauthor | Cho, Sung-Won | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.relation.code | 2012200866 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
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