68
0
Designofcopper/rutheniumCMPslurryforgalvaniccorrosioninhibitionatitsinterface
- Title
- Designofcopper/rutheniumCMPslurryforgalvaniccorrosioninhibitionatitsinterface
- Other Titles
- 구리/루테늄계면에서갈바닉부식억제를위한CMP공정슬러리설계
- Author
- 이강천
- Alternative Author(s)
- 이강천
- Advisor(s)
- 백운규
- Issue Date
- 2020.8
- Publisher
- 한양대학교
- Degree
- Doctor
- Abstract
- Asthedesignrulesofsemiconductorshrinkstosub-7nmandsmaller,changesinmaterialsanddevicestructureshaverealizedthehighperformancedeviceswithnewtechnologies.Amongvariousmetalmaterials,especiallyrutheniumispromisingmaterialaselectrodematerialsforthecapacitorandbarriermaterialsforcopperinterconnectionduetoitsadvantagesoflowelectricalresistanceandexcellentthermal/chemicalstability. However,theseadvantageshavealimitationthatcausesgalvaniccorrosioninbimetallicsystemwithothermetals.Inthisregards,thegalvaniccorrosionshouldbeovercomeintermsofRCdelayanddegradationofthedevices.Therefore,inthisdissertation,whileprovidingthebasicinformationonrutheniumChemicalMechanicalPlanarization(CMP)slurries,thestrategiesandmechanismsforcontrollinggalvaniccorrosionbetweenrutheniumandcopperarecoveredforcopperinterconnectionbarrierstructure. Atfirst,apyridinearomaticcompoundisadoptedtosuppressgalvaniccorrosionincopper/rutheniumbimetallicsystem.Thenitrogenatomofthepyridinefunctionalgroupformsaσ-bondcomplexationwiththemetalcationandadsorbsontothebothcopperandrutheniumsurfaces.However,comparedtoruthenium,copperhasafullyoccupiedd-orbital,soitenablestoadditionalπ-bondingwithapyridineringstructure.Thedifferenceinbondingshowedadissimilarinadsorptionaffinitywitheachmetalion.Inresults,theanodicreactionofcoppersurfaceissuppressedeffectivelybyformingadensecorrosionprotectionlayerontothecopperfilm. Forfurtherstudy,threestructuralisomersofpyridinecarboxylicacidhavebeeninvestigated.Structurally,eachofthreeinhibitorsaresubstitutedtocarboxylgroupsatortho,meta,andparapositionsrespectivelyandareconsideredintermsofreactivitywithcopperions.Inthecaseofnicotinicacidinwhichthecarboxylgroupissubstitutedatthemetaposition,theelectronegativityofthenitrogenatomremainsunaffectedleadingtoformationwithmetalcationsviaσ-bond.Ontheotherhand,theinhibitorssubstitutedattheortho-andthepara-positionshowedrelativelyweakadsorptionaffinityduetoweakeningtheelectronegativityofnitrogenatoms.Furthermore,picolinicacidsubstitutedatadjacentpositiontoanitrogenatomshowedthelowestinhibitionefficiencyowingtosterichindranceeffect. Finally,byapplyingtheinhibitortothecopper/rutheniumbarrierCMPprocess,aslurrypreventsthegalvaniccorrosionattheinterfaceandachievesadesirableselectivityratioof1:1.
- URI
- http://hanyang.dcollection.net/common/orgView/200000438100https://repository.hanyang.ac.kr/handle/20.500.11754/188196
- Appears in Collections:
- GRADUATE SCHOOL[S](대학원) > ENERGY ENGINEERING(에너지공학과) > Theses (Ph.D.)
- Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
