Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정영대 | - |
dc.date.accessioned | 2023-06-22T01:55:39Z | - |
dc.date.available | 2023-06-22T01:55:39Z | - |
dc.date.issued | 2010-12 | - |
dc.identifier.citation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v. 57, NO. 6, Page. 1942.0-1945.0 | - |
dc.identifier.issn | 0374-4884;1976-8524 | - |
dc.identifier.uri | https://www.jkps.or.kr/journal/view.html?volume=57&number=6(1)&spage=1942&year=2010 | en_US |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/182133 | - |
dc.description.abstract | Because top-down approaches, such as the extreme ultraviolet technique and high-index fluid-based immersion ArF lithography, may cover one or two generations, lithography technology for scaling down feature size to sub-10-nm is becoming more complex. The directed self-assembly technology of block copolymers is one candidate for next-generation lithography. In this paper, a directed self-assembly lithography process for block copolymers is modeled and simulated on a molecular scale to solve the challenges associated with directed self-assembly technology. Sub-10-mm patterns can be formed by using precise pattern placement of a conventional 'top-clown' optical lithography with the well-defined nanostructure and self-healing properties of 'bottom-up' block copolymer self-assembly. Simulation results matched the experiment results. | - |
dc.description.sponsorship | Ministry of Education, Science & Technology (MEST), Republic of Korea 2009-0074676 | - |
dc.language | en | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.subject | Lithography | - |
dc.subject | Lithography simulation | - |
dc.subject | Self-assembly | - |
dc.subject | Self-assembly process | - |
dc.subject | Block copolymer | - |
dc.title | Simulation Study of Sub-10 nm Pattern Formation Using Diblock Polymer Directed Self-assembly | - |
dc.type | Article | - |
dc.relation.no | 6 | - |
dc.relation.volume | 57 | - |
dc.identifier.doi | 10.3938/jkps.57.1942 | - |
dc.relation.page | 1942.0-1945.0 | - |
dc.relation.journal | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.contributor.googleauthor | Kim, Sang-Kon | - |
dc.contributor.googleauthor | Oh, Hye-Keun | - |
dc.contributor.googleauthor | Jung, Young-Dae | - |
dc.contributor.googleauthor | An, Ilsin | - |
dc.sector.campus | E | - |
dc.sector.daehak | 과학기술융합대학 | - |
dc.sector.department | 응용물리학과 | - |
dc.identifier.pid | ydjung | - |
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