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Impact of Seed Annealing on the Reliability of Monolithic GaAs/Si p-n Diode Optical Phase Shifters

Title
Impact of Seed Annealing on the Reliability of Monolithic GaAs/Si p-n Diode Optical Phase Shifters
Author
김영현
Issue Date
2022-09
Publisher
IEEE
Citation
2022 EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC),
Abstract
We report the reliability assessment of carrier-depletion p-n diode GaAs/Si optical modulators monolithically integrated on a 300-mm Si wafer. Dark current remains stable under long accelerating aging tests. Devices without seed annealing experience a shift of Vp. Lp with no stress temperature dependence. (C) 2022 The Author(s)
URI
https://ieeexplore.ieee.org/document/9979220?arnumber=9979220&SID=EBSCO:edseeehttps://repository.hanyang.ac.kr/handle/20.500.11754/179149
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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