2022 EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC),
Abstract
We report the reliability assessment of carrier-depletion p-n diode GaAs/Si optical modulators monolithically integrated on a 300-mm Si wafer. Dark current remains stable under long accelerating aging tests. Devices without seed annealing experience a shift of Vp. Lp with no stress temperature dependence. (C) 2022 The Author(s)