스핀코터 성능향상을 위한 진동특성의 실험적 규명

Abstract

Vibration of a spin coater are dften generated by mechanical imbalance and the vibration cause many problems in manufacturing products with thin film such as color filters. In this paper. characteristics of vibrations are studies dy experimental methods to identify vibration sources of a spin coater and new spin coater design techniques by the test result are proposed.