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A study on the application of Low-k and Thermal properties with multi-functional composite via porous polymer network

Title
A study on the application of Low-k and Thermal properties with multi-functional composite via porous polymer network
Author
박재현
Alternative Author(s)
박재현
Advisor(s)
Yong-Ho Choa
Issue Date
2022. 2
Publisher
한양대학교
Degree
Master
Abstract
Recently, low-k (k<4) & high thermal conductive properties polymer composites have been emerged as an inevitable research field owing to overcoming limitations of developing ultra-high-integration semiconductor materials. In addition to the formation of the ultra-fine pattern technology and high thermal conductive properties the realization of high-k thin films for gates, a low-k interconnect layer film has been an essential research field for the improvement of capacitor structures in Dynamic random-access memory (DRAM) and multi-layer metal wire structures in semiconductor devices. Nevertheless, due to the acceleration and minimization was occurred in the multilayer metal wire process, the resistance-capacitance and the resistance of the fine metal wire increased, resulting in a large delay effect of the Resistance-Capacitance (RC) delay time, it caused a variety of problems of the device. Efforts are being made to develop technology to overcome these problems simultaneously. Although the incorporation of pores has been widely reported as the fabrication method that can be approach a dielectric constant of less than 2.5, it has limitation. As an example, under the influence of moisture, chemical and or gaseous species penetrate the open-pore shapes porous structure to change the physical and chemical properties of the material, and the pores have very low thermal conductivity, thereby reducing the thermal properties of the polymer composites. To solve the limitation, we proposed a facile method to prepare a PDMS-based composite by introducing a fluorocarbon (FC), attaining a closed-pore shape of the inner porous structure. In this research, we proposed a facile fabrication method to prepare polydimethylsiloxane (PDMS)-based composites by introducing a fluorocarbon solvent, which porogen (pore generator) roles, attaining a random porous structure. In addition, we also tried to confirm the two conductive filler-based on potential applicability by carbon-based electrical conductive filler Multi-walled carbon nanotube (MWCNT) for a flexible capacitive pressure sensor and hexagonal-Boron Nitride (h-BN) filler in high thermal dissipation properties composites. This dissertation consists of four chapters. In Chapter 1, the theoretical research background of low-k and high thermal conductive properties composite materials were introduced, starting with the manufacturing technology for polymer composites with low-k and high thermal properties and the comprehensive theory. In particular, it focused on the properties of materials with low-k properties applied to the polymer interconnect layer film of semiconductors, and the prospects and future development of low-k materials and polymer composite materials with high thermal conductive properties were considered. In chapter 2, a phase separation process was incorporated using a fluorocarbon solvent with low surface energy as a pore formation (porogen) based on a PDMS polymer matrix, and a closed-pore shape was implemented inside the polymer matrix. To improve thermal properties based on a porous structure having a lower dielectric constant than before existing, a 2-Dimensional h-BN inorganic filler was used to confirm the dielectric and thermal conductivity tendency as a function of h-BN concentrations. Also, functionalization of surface modification by silane coupling agent treatment was confirmed for improving interfacial compatibility with the polymer matrix and filler, reducing interfacial thermal resistance. In chapter 3, based on the PDMS porous polymer matrix implemented in Chapter 2, MWCNT, a carbon-based electrically conductive filler, was used to confirm the overall characteristics of each porous and dense structure properties and as a function of MWCNT concentration and in order to the capacitive pressure sensor applicability, was overall properties confirmed. In the last chapter, it summarized the overall contents and the implications of this dissertation.
URI
http://hanyang.dcollection.net/common/orgView/200000589565https://repository.hanyang.ac.kr/handle/20.500.11754/167944
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Theses(Master)
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