마이크로 금 전해 도금 구조물의 잔류응력 측정
- Title
- 마이크로 금 전해 도금 구조물의 잔류응력 측정
- Other Titles
- Residual Stress Measurement of Micro Gold Electroplated Structure
- Author
- 안유민
- Keywords
- 잔류응력(Residual stress ); 금 전해도금(Gold electroplating ); 표면 미세가공(Surface micro-machining ); 미소 구조물(Micro-structure )
- Issue Date
- 2000-12
- Publisher
- 한국정밀공학회
- Citation
- 한국정밀공학회지, v. 17, no. 12, page. 195-200
- Abstract
- In order to find a residual stress in the micro-machined beam, first natural frequency of the beam that has the residual stress inside is analyzed using the Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process. The made structure is clamped-clamped beam and its 1st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-machined beam to ideal beam is calculated by FEM. The residual stress is estimated from the equivalent length and the measured natural frequency.
- URI
- https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00849939https://repository.hanyang.ac.kr/handle/20.500.11754/162372
- ISSN
- 1225-9071; 2287-8769
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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