Repository at Hanyang UniversityCOLLEGE OF ENGINEERING SCIENCES[E](공학대학)ROBOT ENGINEERING(로봇공학과)Articles
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스핀 코터 성능향상을 위한 모델링 및 민감도 해석
- Title
- 스핀 코터 성능향상을 위한 모델링 및 민감도 해석
- Other Titles
- Modelling and Sensitivity Analysis for the Performance Improvement of a Spin Coater
- Author
- 한창수
- Issue Date
- 2000-12
- Publisher
- 한국공작기계학회
- Citation
- 한국공작기계학회논문집, v. 9, no. 5, page. 96-102
- URI
- https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00922708https://repository.hanyang.ac.kr/handle/20.500.11754/162320
- ISSN
- 1226-8097
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ROBOT ENGINEERING(로봇공학과) > Articles
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