Repository at Hanyang UniversityCOLLEGE OF ENGINEERING SCIENCES[E](공학대학)ELECTRICAL ENGINEERING(전자공학부)Articles
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다양한 IDT 금속막을 이용한 ZnO-SAW 필터의 제작 및 특성 분석
- Title
- 다양한 IDT 금속막을 이용한 ZnO-SAW 필터의 제작 및 특성 분석
- Other Titles
- Fabrication and characterization of ZnO-based SAW filters using various IDT metals
- Author
- 박진석
- Issue Date
- 2001-07
- Publisher
- The Korean Institute of Electrical Engineers
- Citation
- 2001년도 대한전기학회 하계학술대회 논문집 C, page. 1390-1392
- Abstract
- ZnO-based SAWCsurface acoustic wave) filters are fabricated with the configuration of IDT/ZnO/Si02/Si (100) using various IDT materials such as Al. Cu/Ti. and Cu/Al. Their frequency response characteristics are measured and compared. The thickness of Al IDT is varied to examine the mass loading effect. In addition, effects of thermal treatment and electrical stress on the frequency responses of the fabricated SAW filters are investigated
- URI
- https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE01326657?https://repository.hanyang.ac.kr/handle/20.500.11754/160348
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ELECTRICAL ENGINEERING(전자공학부) > Articles
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