MPCVD 방법에 의해 증착된 다결정 다이아몬드 박막의 결정성 및 표면 거칠기 향상에 관한 연구
- Title
- MPCVD 방법에 의해 증착된 다결정 다이아몬드 박막의 결정성 및 표면 거칠기 향상에 관한 연구
- Other Titles
- A study on the improvement of crystallinity and surface roughness of polycrystalline diamond films deposited by MPCVD method
- Author
- 박진석
- Issue Date
- 2001-07
- Publisher
- The Korean Institute of Electrical Engineers
- Citation
- 2001년도 대한전기학회 하계학술대회 논문집 C, page. 1349-1351
- Abstract
- Polycrystalline diamond films are deposited by using a microwave plama CVD system, where the bias-enhanced nucleation (BEN) method is employed. Effects of the varying microwave power, the surface treatment by hydrogen plasma, and the cyclic hydrogen etching during deposition on the crystallinity as well as on the surface roughness of deposited films are examined by Raman spectroscopy. SEM. and AFM. A novel method for achieving a smoother diamond surface is also suggested through the indirect wafer bonding and back-side polishing.
- URI
- https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE01326643?https://repository.hanyang.ac.kr/handle/20.500.11754/160347
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ELECTRICAL ENGINEERING(전자공학부) > Articles
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