스핀 코터 시스템의 진동 저감을 위한 3차원 모델링과 민감도 해석

Abstract

In this paper, the dynamic system modeling and the state sensitivity analysis of the spin-coater system for the reduction of the vibration are proposed. In the respect of modeling, the spin-coater system is composed of components of servomotor, belt, spindle, and a supported base. Each component is defined and combined modeling is derived to 3 dimensional equations. Verification of modeling is verified by experimental values of actual system in the frequency domain. By direct differentiation the constraint equations with respect to kinematic design variables, such as eccentricity of spindle, moment of inertia, torsional stiffness and damping of supported base, sensitivity equations are derived to the verified state equations. Sensitivity of design variables could be used for vibration reduction and natural frequency shift in the frequency domain. Finally, dominant design variables could be selected based on the sensitivity analysis.