Repository at Hanyang UniversityGRADUATE SCHOOL[S](대학원)MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)Theses(Master)
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Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND
- Title
- Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND
- Other Titles
- 3D NAND 고종횡비 표면 세정을 위한 H2SO4-H2O2-HF (DSP+) 혼합물의 제조 및 평가
- Author
- 안국현
- Alternative Author(s)
- 안국현
- Advisor(s)
- 박진구
- Issue Date
- 2021. 2
- Publisher
- 한양대학교
- Degree
- Master
- Abstract
- 본 연구에서는 3차원(3D) NAND 플래시 High-Aspect Ratio Contact에서 오염 물질을 제거하기 위해 기존에 사용하고 있는 DHF, SPM 세정의 한계를 보완하기 위해 DSP++IPA 용액으로 세정 평가를 진행하였다.
- URI
- https://repository.hanyang.ac.kr/handle/20.500.11754/159278http://hanyang.dcollection.net/common/orgView/200000485544
- Appears in Collections:
- GRADUATE SCHOOL[S](대학원) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Theses(Master)
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