Repository at Hanyang UniversityCOLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)PHOTONICS AND NANOELECTRONICS(나노광전자학과)Articles
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Calibrations in rotating compensator spectroscopic ellipsometry
- Title
- Calibrations in rotating compensator spectroscopic ellipsometry
- Other Titles
- 회전보상기를 이용한 분광타원기술에 있어서의 캘리브레이션
- Author
- 안일신
- Issue Date
- 2001-02
- Publisher
- 한국광학회
- Citation
- 한국광학회 학술대회 2001년 논문집, page. 256-259
- Abstract
- Rotating-compensator type ellipsometer was developed for spectroscopic measurements. For accurate data reduction, the azimuths of transmission axises of polarizer and analyzer, and the angular position of the fast axis of compensator should be determined through calibration process. In this paper, we present various calibration methods.
- URI
- https://www.koreascience.or.kr/article/CFKO200111922649795.pagehttps://repository.hanyang.ac.kr/handle/20.500.11754/158688
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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