Fast and Accurate Quasi-3-Dimensional Capacitance Determination of MultiLayer VLSI Interconnects
- Title
- Fast and Accurate Quasi-3-Dimensional Capacitance Determination of MultiLayer VLSI Interconnects
- Author
- 어영선
- Keywords
- Crosstalk; interconnect capacitance; multilayer; shielding effect; signal delay; VLSI interconnects
- Issue Date
- 2001-06
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Citation
- IEEE Transactions on Very Large Scale Integration (VLSI) Systems, v. 9, issue. 3, page. 450-460
- Abstract
- A new fast and accurate capacitance determination methodology for intricate multilayer VLSI interconnects is presented, Since a multilayer interconnect structure is too complicated to be directly tractable, it is simplified by investigating charge distributions within the system, The quasi-three-dimensional (3-D) capacitances of the structure are then determined by combining a set of solid-ground-based two-dimensional (2-D) capacitances and shielding effects that can be independently calculated from the simplified structure, The shielding effects due to the neighboring lines of a line can be analytically determined from the given layout dimensions, The solid-ground-based 2-D capacitances can also be quickly computed from the simplified structure. Thus, the proposed capacitance determination methodology is much more cost-efficient than conventional 3-D-based methods. It is shown that the calculated quasi-3-D capacitances have excellent agreement with 3-D held-solver-based results within 5% error.
- URI
- https://ieeexplore.ieee.org/abstract/document/929579https://repository.hanyang.ac.kr/handle/20.500.11754/158372
- ISSN
- 1063-8210; 1557-9999
- DOI
- 10.1109/92.929579
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ELECTRICAL ENGINEERING(전자공학부) > Articles
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