반응로내 이온주입에 의한 초미세 입자의 합성 및 응집제어

Abstract

Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size SiO2 particles are synthesized by the injection of TEOS vapor, ions and reaction gas in furnace, lons were generated by Corona discharge electrode and these ions charge SiO2 particles. As a result, spherical, nonagglomerated and ultrafine particles are generated in various conditions, it's morphology, charging portion and size distribution are examined by using TEM, ESP, and SMPS. As the applied voltage of electrode changes from 0 kV to 5.0 kV, it is observed that the mean diameter of SiO2 particle decreases from 94 nm to 42nm.