High moment and high frequency permeability Fe-B-N nanocrystalline soft magnetic films

Abstract

As-sputtered Fe–B–N films have been prepared by a reactive RF magnetron sputtering method at 450 W input power. Fe–B–N films exhibit that 4πMs and is 16.7–20.8 kG and 0.15–30 Oe, respectively. In addition, the frequency dependence of permeabilities is maintained between 100 and 500 MHz. Fe91.6B2.5N5.9 film exhibits that 4πMs is 19.5 kG, μ′∼4600(100 MHz). Also Fe85.9B2.6N11.5 film shows excellent high frequency characteristics up to 500 MHz (μ′=1000) with high 4πMs ∼18 kG. The corrosion resistance of these films is better than that of FeXN (X=Hf, Ti, etc.) films.