CFD를 이용한 CMP Pad Groove 형상 설계 연구
- Title
- CFD를 이용한 CMP Pad Groove 형상 설계 연구
- Other Titles
- Design of Pad Groove in CMP using CFD
- Author
- 이도형
- Keywords
- CMP; Groove (그루브); Pad (패드); Two-phase flow (이상유동); Vortex (와류)
- Issue Date
- 2003-12
- Publisher
- 한국유체기계학회
- Citation
- 유체기계저널, v. 6, no. 4, page. 21-28
- Abstract
- CMP (Chemical Mechanical Polishing) is to achieve adequate local and global planarization for future sub-micrometer VLSI requirements. In designing CMP, numerical computation is quite helpful in terms of reducing the amount of experimental works. Stresses on pad, concentration of particles and particle tracking are studied for design. In this research, the optimization of grooved pad shape of CMP is performed through numerical investigation of slurry flow in CMP process. The result indicates that the combination of sinusoidal groove and skewed pad is the most optimal shape among the twenty candidates. Useful information can be obtained in velocity, pressure, stress, concentration of particles and particles trajectories, etc.
- URI
- http://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00656331https://repository.hanyang.ac.kr/handle/20.500.11754/156728
- ISSN
- 2287-9706
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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