Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김옥경 | - |
dc.date.accessioned | 2021-01-08T01:33:11Z | - |
dc.date.available | 2021-01-08T01:33:11Z | - |
dc.date.issued | 2003-12 | - |
dc.identifier.citation | 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집, page. 18-22 | en_US |
dc.identifier.uri | https://www.dbpia.co.kr/Journal/articleDetail?nodeId=NODE09428702 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/156704 | - |
dc.description.abstract | The general users find difficulties in using ellipsometers. Thus, the object of this study is to construct an ellipsometer with simple operation principle. We developed an ellipsometer which does not require alignment and calibration before measuring sample. A basis structure model after rotating a compensator spectroscopic ellipsometry, the fixed incidence angle at 70∘. This ellipsometer does not demand calibration, because the plane of incidence is not changed due to the novel sample holder structure. The results for various standard samples were compared with those from conventional RCSE to test the performance of this instrument. Also repeated measurements were performed to test the precision of the calibration coefficient in a plane of incidence fixed. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 한국반도체디스플레이기술학회 | en_US |
dc.subject | Calibration and Fixed a Plane of Incidence | en_US |
dc.subject | Residual Calibration | en_US |
dc.subject | Phase Calibration | en_US |
dc.title | Ellipsometry에서의 Calibration 및 입사면 고정형 Ellipsometer | en_US |
dc.title.alternative | Calibration and a Plane of Incidence Fixed Ellipsometer | en_US |
dc.type | Article | en_US |
dc.relation.journal | 한국반도체장비학회지 | - |
dc.contributor.googleauthor | 경재선 | - |
dc.contributor.googleauthor | 오혜근 | - |
dc.contributor.googleauthor | 안일신 | - |
dc.contributor.googleauthor | 김옥경 | - |
dc.relation.code | 2012210661 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E] | - |
dc.sector.department | DEPARTMENT OF APPLIED PHYSICS | - |
dc.identifier.pid | 1790146 | - |
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