초정밀 위치 제어를 위한 이중 서보시스템의 보상기 설계
- Title
- 초정밀 위치 제어를 위한 이중 서보시스템의 보상기 설계
- Other Titles
- Designing Compensators of Dual Servo System For High Precision Positioning
- Author
- 한창수
- Keywords
- VCM; Dual Servo; Position Control; PQ method; Compensator; PID Controller; Flexure Hinge; Capacitive sensor; 브시앰; 이중서보; 위치 제어; 보상기
- Issue Date
- 2003-12
- Publisher
- 대한기계학회
- Citation
- 대한기계학회 2003년 춘계학술대회논문집, page. 1309-1314
- Abstract
- The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.
- URI
- http://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00547585?https://repository.hanyang.ac.kr/handle/20.500.11754/156583
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ROBOT ENGINEERING(로봇공학과) > Articles
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