SICE 2003 Annual Conference, v. 3, page. 2732-2737
Abstract
This paper presents a micro positioning mechanism with dual servo system. In the fields of
micro positioning, micromanipulation and micro test instrument, the required motion precision is
continuously increasing. Dual servo system consisting of a coarse stage and a fine motion stage with
VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge
joint. Lead compensator is applied to this control system, and is designed by PQ method.