SICE 2003 Annual Conference, v. 2, page. 1644-1649
Abstract
In this paper, Error compensation using an ermr budget method for repeatability improvement of the micropositioning system was studied. The micro-positioning system was developed for a micro-pressing machine. Error
compensation using an error budget method was applied and accumulated error was minimized. In this study, the error model
was derived and error compensation was performed through the experiments. We can get an improvement of the precision in
experiment system