화학기상응축 공정에서 TiO2 나노입자 특성에 미치는 반응온도와 전구체 농도의 영향 - Part I: SMPS를 이용한 실시간 입자특성 평가

Abstract

Properties of nanoparticles synthesized during gas phase reaction were studied in terms of particle behaviors using real-time particle characterization method. For this study, Ti0 2 nanoparticles were synthesized in the chemical vapor condensation process(CVC) and their in-situ measurement of particle formation and particle size distribution was performed by scanning mobility particle sizer(SMPS). As a result, particle behaviors in the CVC reactor were affected by both of number concentration and thermal coa llation ， simultaneously. Particularly, growth ld agglomeration between nanoparticles followed two different ways of dominances from coagulations by increase of number concentration and sintering effect by increased temperature.