재료의 기계적 물성측정 시험 장치를 위한 이중서보 시스템에 관한 연구
- Title
- 재료의 기계적 물성측정 시험 장치를 위한 이중서보 시스템에 관한 연구
- Other Titles
- Study of Dual Servo System for Measurement System of Mechanical Property
- Author
- 한창수
- Keywords
- 박막시험기; 나노 경도계; 보이스코일모터; 피에죠; 이중서보; 정밀위치 결정기
- Issue Date
- 2003-06
- Publisher
- 한국반도체장비학회
- Citation
- 한국반도체장비학회지, v. 2, no. 2, page. 31-37
- Abstract
- This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.
- URI
- https://scienceon.kisti.re.kr/srch/selectPORSrchArticle.do?cn=JAKO200311923081633https://repository.hanyang.ac.kr/handle/20.500.11754/155977
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ROBOT ENGINEERING(로봇공학과) > Articles
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